Laser Lithography System for Quantum Technology Cleanroom
Procurement of a laser lithography system for manufacturing UV masks and direct lithography on target substrates for quantum technology applications.
CONTRACTING AUTHORITY
Name
Deutsches Zentrum für Luft- und Raumfahrt e.V. (DLR)
City
Köln
Country
DE
CLASSIFICATION
Procedure Type
Open Procedure
Contract Type
Supplies
Main CPV
38000000, Laboratory, optical and precision equipments (excl. glasses).
ADDITIONAL DETAILS
EU Funded
Yes
Suitable for SMEs
No
Electronic Submission
Required
Legal Basis
32014L0024
DEADLINES & TIMELINE
Submission Deadline
31 days remaining(LOT-0001)
Published