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Activeted-415187-2026

Plasma Etcher and Deposition Tools for University College Cork

We are seeking tenders for the supply and installation of plasma etching and deposition tools for University College Cork. These tools are crucial for fabricating semiconductor devices and will enhance research capabilities.

€3,300,000
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CONTRACTING AUTHORITY

Name

Education Procurement Service (EPS)

City

Limerick

Country

IE

CLASSIFICATION

Procedure Type

Open Procedure

Contract Type

Supplies

Main CPV

38000000, Laboratory, optical and precision equipments (excl. glasses).

LOTS (4)

LOT-0001Supplies

Plasma Etcher für Silizium und Dielektrika

€3,300,000

LOT-0002Supplies

Plasma Etcher für Metalle und Piezoelektrika

€3,300,000

LOT-0003Supplies

Plasma Etcher für langsame und kontrollierbare Atomlagenätzung

€3,300,000

LOT-0004Supplies

Plasma Deposition PECVD

€3,300,000

ADDITIONAL DETAILS

EU Funded

Yes

Electronic Submission

Required

Legal Basis

32014L0024

DEADLINES & TIMELINE

Submission Deadline

29 days remaining

(LOT-0001)

Published

TENDER DOCUMENTS

29 days remaining

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