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Activeted-452081-2026

Low-Temperature Metal Via Filling Deposition Equipment

Procurement of specialized deposition equipment for low-temperature metal via filling, intended for research and development of 10nm FDSOI technologies and beyond for memory applications in cleanrooms.

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CONTRACTING AUTHORITY

Name

CEA Grenoble

City

Grenoble

Country

FR

CLASSIFICATION

Procedure Type

neg-w-call

Contract Type

Supplies

Main CPV

31712100, Microelectronic machinery and apparatus.

ADDITIONAL DETAILS

EU Funded

Yes

Electronic Submission

Required

Legal Basis

32014L0024

DEADLINES & TIMELINE

Submission Deadline

30 days remaining

(LOT-0001)

Published

TENDER DOCUMENTS

30 days remaining

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