CMP System for 100/150 mm Wafer
Procurement of a chemical-mechanical polishing system for 100/150 mm semiconductor wafers to planarize surfaces and improve roughness. This enables subsequent wafer fusion bonding of III-V semiconductors with Si wafers.
CONTRACTING AUTHORITY
Name
Fraunhofer-Gesellschaft - Einkauf B12
City
München
Country
DE
CLASSIFICATION
Procedure Type
Open Procedure
Contract Type
Supplies
Main CPV
42900000, Miscellaneous general and special-purpose machinery.
ADDITIONAL DETAILS
EU Funded
Yes
Suitable for SMEs
Yes
Electronic Submission
allowed
Legal Basis
32014L0024
DEADLINES & TIMELINE
Submission Deadline
21 days remaining(LOT-0000)
Published