Activehilma-EF-49196
Optical Film Stress Measurement Tool
Procurement of an automated 200mm system for non-contact measurement of film stress and wafer bow using laser scanning for cleanrooms. The system includes a cassette load lock, robot handling, and analysis software.
CONTRACTING AUTHORITY
Name
VTT Technical Research Centre of Finland Ltd
Country
FI
CLASSIFICATION
Procedure Type
Open Procedure
Contract Type
Supplies
Main CPV
38000000, Laboratory, optical and precision equipments (excl. glasses).
ADDITIONAL DETAILS
Suitable for SMEs
Yes
Electronic Submission
Required
Legal Basis
32014L0024
DEADLINES & TIMELINE
Submission Deadline
11 days remaining(LOT-0000)
Published