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Activehilma-EF-48648

Plasma-enhanced chemical vapor deposition system for VTT

Procurement of an automated PECVD system for depositing dielectric thin films for research and pilot lines at the VTT Micronova cleanroom.

CONTRACTING AUTHORITY

Name

TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

Country

FI

CLASSIFICATION

Procedure Type

neg-wo-call

Contract Type

Supplies

Main CPV

38000000 – Laboratory, optical and precision equipments (excl. glasses).

ADDITIONAL DETAILS

Electronic Submission

Required

Legal Basis

32014L0024

DEADLINES & TIMELINE

Submission Deadline

183 days remaining

(LOT-0000)

Published

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