Plasma-enhanced chemical vapor deposition system for VTT
Procurement of an automated PECVD system for depositing dielectric thin films for research and pilot lines at the VTT Micronova cleanroom.
CONTRACTING AUTHORITY
Name
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
Country
FI
CLASSIFICATION
Procedure Type
neg-wo-call
Contract Type
Supplies
Main CPV
38000000 – Laboratory, optical and precision equipments (excl. glasses).
ADDITIONAL DETAILS
Electronic Submission
Required
Legal Basis
32014L0024
DEADLINES & TIMELINE
Submission Deadline
183 days remaining(LOT-0000)
Published