ALD Tool for Advanced Metal and Metal Nitride Films for CEA Grenoble

Delivery and commissioning of a fully automatic ALD (Atomic Layer Deposition) tool: The equipment is intended for processing 300 mm wafers (or 200 mm with 200-300 mm adapters), for depositing metals and metal nitrides for non-volatile memories and advanced contacts. A cleaning solution to improve surface quality before deposition is also included. One mandatory option covers Level 1 maintenance training. Optional options include heat exchangers and cooling systems, an electrical transformer, advanced maintenance training, preventive and corrective maintenance services and spare parts, a one-year warranty extension, and transport including insurance according to DAP CEA Grenoble (Incoterms ICC 2020).

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