Automated solvent wet bench for BEOL stripping for CEA Grenoble
Procurement of an automated solvent wet bench for BEOL stripping, including optional add-ons like particle and HF tanks, and cooling systems.
CONTRACTING AUTHORITY
Name
CEA Grenoble
City
Grenoble
Country
FR
CLASSIFICATION
Procedure Type
neg-w-call
Contract Type
Supplies
Main CPV
31712100, Microelectronic machinery and apparatus.
Other CPV
39181000, Laboratory benching.
ADDITIONAL DETAILS
EU Funded
Yes
Electronic Submission
Required
Legal Basis
32014L0024
DEADLINES & TIMELINE
Submission Deadline
38 days remaining(LOT-0001)
Published