Dual Beam FIB System and Transmission Electron Microscope

Delivery, installation, commissioning, and ready-for-operation handover of a Dual-Beam-FIB/SEM system (Focused Ion Beam / Scanning Electron Microscope) including analytical detector systems, training, and complete system documentation. The system primarily serves precise sample preparation (e.g., TEM lamellae, APT tips, cross-sections, and defect exposure) and secondarily high-resolution imaging, chemical, and structural characterization (SEM, EDX, STEM, EBSD) for scientific research projects. Key focuses include reproducible, preferably automated TEM lamellae and APT preparation (Lift-Out, Thinning, Polishing), 3D analysis (serial sectioning/tomography) with quantitative evaluation, high-resolution imaging in various SEM modes including ion-induced secondary ions and correlated imaging during processing, chemical analysis via EDX, and crystallographic analysis via EBSD. Structured acquisition and export capability of measurement data and metadata in common, non-proprietary formats are required to meet demands for traceability, long-term availability, and research data management (FAIR principles). Core functions include material removal/structuring (manual and automated) with definable pattern and recipe functions, TEM lamellae preparation including in-situ lift-out, thinning, and final fine polishing, APT tip preparation (needle milling) including reproducible geometry, correlated real-time imaging in SEM during FIB processing, chemical analysis via EDX and crystallographic analysis via EBSD (point, line, mapping), 3D workflows (serial sectioning/tomography) with documented reconstruction or export of datasets, and workflow and data management with clear assignment of processing/measurement data, parameters, and metadata, and export in non-proprietary formats.

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