Activeted-368559-2026
Thin Film Measurement Tool for 200/300 mm Wafers
Procurement of a thin film measurement tool for research on FD-SOI technologies (10nm and beyond). The equipment must integrate ellipsometry and spectral reflectometry for precise measurements on 200/300mm wafers in a Class 100 cleanroom.
CONTRACTING AUTHORITY
Name
CEA/GRENOBLE
City
Grenoble
Country
FR
CLASSIFICATION
Procedure Type
neg-w-call
Contract Type
Supplies
Main CPV
31700000, Electronic, electromechanical and electrotechnical supplies.
Other CPV
31712100, Microelectronic machinery and apparatus.
ADDITIONAL DETAILS
EU Funded
Yes
Electronic Submission
Required
Legal Basis
32014L0024
DEADLINES & TIMELINE
Submission Deadline
1 day remaining(LOT-0001)
Published