Optical Metrology Equipment for 100/150/200mm Wafers for CEA LETI
Procurement of an optical inspection system for 100-200mm wafers for research and development. The system replaces old equipment and qualifies cleanroom processes.
CONTRACTING AUTHORITY
Name
CEA/GRENOBLE
City
Grenoble
Country
FR
CLASSIFICATION
Procedure Type
neg-w-call
Contract Type
Supplies
Main CPV
31700000, Electronic, electromechanical and electrotechnical supplies.
Other CPV
31712100, Microelectronic machinery and apparatus.
ADDITIONAL DETAILS
EU Funded
Yes
Electronic Submission
Required
Legal Basis
32014L0024
DEADLINES & TIMELINE
Submission Deadline
37 days remaining(LOT-0001)
Published