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Ultra-High Vacuum Thin-Film Deposition System

Status
Active
Submission Deadline
173 days remaining
Contracting authority
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY9 more open tenders view
Location
Finland
Procedure
Negotiated procedure without prior call for competition · Supplies
Category
Laboratory, optical and precision equipments (excl. glasses).
Published
Reference
hilma-EF-53861

Supply of an Ultra-High Vacuum Thin-Film Deposition System: Special equipment for growing thin-film structures, designed for research and product development to produce particularly clean and controlled structures in ultra-high vacuum. The system processes 200 mm wafers and is custom-made as a single unit for VTT's specific research needs, particularly for VTT Micronova's semiconductor manufacturing processes. Installation will take place in Micronova's cleanroom for scientific purposes. Customization includes deposition devices, materials, evaporation devices, vacuum pumps, gas lines, chamber configurations, sensors, and measuring devices. The contract covers the design, manufacturing, and installation of this customized equipment.

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Additional details

Electronic Submission
Required
Legal Basis
32014L0024
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